Applied Materials - Nanomanufacturing
Applied Materials' IP portfolio includes more than 8,000 patents worldwide and technologies.
Applied Semitool HF Vapor Etch
"The Semitool HF Vapor etch system is capable of releasing MEMS devices by removing sacrificial layers surrounding mechanical elements. Based on an isopropyl alcohol and hydrogen fluoride chemistry, the system delivers excellent uniformity, both within-wafer and from wafer to wafer, while preventing damage to the surrounding materials – essential for reliable MEMS device function."